Lithographic apparatus
WebLithography method and lithography apparatus 申请号：JP2024566192 申请日：20151210 公开号：JP6792572B6 公开日：20241223 摘要：A method includes exposing number of fields on a substrate, obtaining data about a field and correcting exposure of the field in subsequent exposures. Web27 nov. 2024 · The lithographic apparatus further includes a control unit 120 which controls all the movements and measurements of the various actuators and sensors …
Lithographic apparatus
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WebThe lithographic apparatus includes a projection system configured to project a patterned radiation beam to form an exposure area of a substrate held on a substrate table. The … WebIn a lithographic apparatus, a feedforward transfer function of a control system, is determined by: a) iteratively learning a feedforward output signal of the control system by …
Web588740692 - EP 4162324 A1 20240412 - SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A … WebThe lithographic apparatus according to claim 4, wherein the first seal, the second seal and/or third seal comprises any one or combinations of acrylic rubber, butadiene rubber, …
Web2 sep. 2024 · G03F7/00 — Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; G03F7/0002 — Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called …
Web9. A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, the apparatus comprising: a substrate table configured to …
Web23 mei 2005 · Abstract: A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first … fitness blender cardio myfitnesspal communityWeb1 mei 2008 · Lithographic apparatus include steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one pass, and … fitness blender cardio strength trainingWeb29 nov. 2012 · The lithographic apparatus component of claim 2, wherein the lithographic apparatus component is a projection system wall, a substrate table, a mirror, a heat sink … fitness blender cheat eating outWebFind many great new & used options and get the best deals for Vintage Marx Pressed Metal Litho Dick Tracy Squad Friction Police Car in box at the best online prices at eBay! Free shipping for many products! Skip to main content. Shop by ... Trucks & Vans, Marx Collectors & Hobbyists Friction Toys, Marx Pressed Steel Vintage Manufacture Diecast ... can i add gmail to my s3 smart watchWebAn immersion lithographic apparatus includes: a projection system for projecting a patterned beam of radiation through an optical element of a final lens element of a … fitness blender cardio for peopleWebA lithographic apparatus is provided that includes an illumination system for conditioning a beam of radiation, and a support for supporting a patterning device. The patterning … can i add glass doors to billy bookcase ikeaWebAn immersion lithography apparatus is disclosed in which liquid is supplied to a space between a projection system and a substrate, and a plate structure is provided to divide the space into two parts. The plate structure has an aperture to allow transmission of the projection beam, has through holes in it to reduce the damping effect of the presence of … can i add graphic card in laptop